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| Name | Last modified | Size | Description |
|---|---|---|---|---|
| Parent Directory | - | ||
| Campbell textbook Errata 3rd edition.pdf | 2010-03-30 16:05 | 179K | |
| ECE416&516_Syllabus_S12.pdf | 2012-04-02 10:26 | 26K | |
| Lecture 1 Introduction [Compatibility Mode].pdf | 2012-04-02 10:36 | 1.3M | |
| Lecture 2 Semiconductor substrates [Compatibility Mode].pdf | 2012-04-02 10:37 | 1.8M | |
| Lecture 3 Diffusion.pdf | 2012-04-09 10:52 | 1.2M | |
| Lecture 4 Oxidation.pdf | 2012-04-10 23:48 | 1.5M | |
| Lecture 5 Implantation.pdf | 2012-04-23 08:59 | 1.6M | |
| Lecture 6 RTP.pdf | 2012-04-23 09:00 | 639K | |
| Lecture 7 Optical Lithography.pdf | 2012-04-23 09:01 | 1.5M | |
| Lecture 8 Photoresist.pdf | 2012-04-23 09:02 | 943K | |
| Lecture 9 Non-Optical Lithography.pdf | 2012-04-23 09:03 | 939K | |
| Lecture 10 Vacuum & Plasmas.pdf | 2012-04-30 10:36 | 1.5M | |
| Lecture 12 Etching.pdf | 2012-05-07 09:33 | 1.0M | |
| Lecture 13 Physical Vapor Deposition (PVD).pdf | 2012-05-14 13:46 | 2.7M | |
| Lecture 15 CVD & Epitaxy.pdf | 2012-05-21 13:56 | 1.9M | |
| Lecture 16 Back-end & Manufacturing.pdf | 2012-05-21 13:57 | 1.9M | |